Ultraviolet lithography of self-assembled monolayers for submicron patterned deposition

  1. Friebel, S.
  2. Aizenberg, J.
  3. Abad, S.
  4. Wiltzius, P.
Revue:
Applied Physics Letters

ISSN: 0003-6951

Année de publication: 2000

Volumen: 77

Número: 15

Pages: 2406-2408

Type: Article

DOI: 10.1063/1.1316066 GOOGLE SCHOLAR
La source de données: Scopus