Ultraviolet lithography of self-assembled monolayers for submicron patterned deposition

  1. Friebel, S.
  2. Aizenberg, J.
  3. Abad, S.
  4. Wiltzius, P.
Journal:
Applied Physics Letters

ISSN: 0003-6951

Year of publication: 2000

Volume: 77

Issue: 15

Pages: 2406-2408

Type: Article

DOI: 10.1063/1.1316066 GOOGLE SCHOLAR
Data source: Scopus